Publication:

Demonstration of lithium niobate integration on a 200-mm silicon photonics wafer using transfer printing

Date

2025
Journal article
https://doi.org/10.1364/OL.564405
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dc.contributor.authorNiels, Margot
dc.contributor.authorVissers, Ewoud
dc.contributor.authorVanackere, Tom
dc.contributor.authorMoerman, Arno
dc.contributor.authorGuo, Xin
dc.contributor.authorGeerinck, Peter
dc.contributor.authorSoltanian, Emad
dc.contributor.authorZhang, Jing
dc.contributor.authorJanssen, Sofie
dc.contributor.authorVerheyen, Peter
dc.contributor.authorSingh, Neha
dc.contributor.authorBode, Dieter
dc.contributor.authorDavi, Martin
dc.contributor.authorFerraro, Filippo
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBalakrishnan, Sadhishkumar
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorHaensch, Sebastian
dc.contributor.authorMai, Hanh
dc.contributor.authorSingh, Nishant
dc.contributor.imecauthorNiels, Margot
dc.contributor.imecauthorVissers, Ewoud
dc.contributor.imecauthorVanackere, Tom
dc.contributor.imecauthorMoerman, Arno
dc.contributor.imecauthorGuo, Xin
dc.contributor.imecauthorGeerinck, Peter
dc.contributor.imecauthorSoltanian, Emadreza
dc.contributor.imecauthorZhang, Jing
dc.contributor.imecauthorJanssen, Sofie
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorSingh, Neha
dc.contributor.imecauthorBode, Dieter
dc.contributor.imecauthorDavi, Martin
dc.contributor.imecauthorFerraro, Filippo
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBalakrishnan, Sadhishkumar
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorSingh, Nishant
dc.contributor.imecauthorRoelkens, Guenther
dc.contributor.imecauthorUvin, Sarah
dc.contributor.orcidimecVissers, Ewoud::0000-0002-5765-0552
dc.contributor.orcidimecVanackere, Tom::0000-0003-4692-9467
dc.contributor.orcidimecMoerman, Arno::0000-0003-0945-2786
dc.contributor.orcidimecGuo, Xin::0000-0002-4744-1968
dc.contributor.orcidimecZhang, Jing::0000-0001-6608-9990
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecBode, Dieter::0000-0001-5351-285X
dc.contributor.orcidimecFerraro, Filippo::0000-0002-9328-5548
dc.contributor.orcidimecAbsil, Philippe::0009-0001-5644-1628
dc.contributor.orcidimecBalakrishnan, Sadhishkumar::0009-0006-1803-6767
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecSingh, Nishant::0000-0003-0609-1145
dc.contributor.orcidimecUvin, Sarah::0000-0001-6008-9906
dc.contributor.orcidimecBillet, Maximilien::0000-0002-5784-5050
dc.contributor.orcidimecKuyken, Bart::0000-0002-8745-7833
dc.date.accessioned2025-08-25T03:55:55Z
dc.date.available2025-08-25T03:55:55Z
dc.date.issued2025
dc.description.abstractWe present a scalable approach for the heterogeneous integration of lithium niobate onto silicon photonics platforms using wafer-scale micro-transfer printing. This approach enables the incorporation of efficient, high-speed modulators while maintaining compatibility with back-end processing. Electro-optic modulators with a length of 7 mm, fabricated with this technology, achieve a half-wave voltage of 4 V and a bandwidth exceeding 70 GHz. Furthermore, as proof of concept, we demonstrate the integration of more than 200 lithium niobate photonic structures directly on a 200-mm wafer and characterize their passive optical properties.
dc.description.wosFundingTextFunding. Fonds Wetenschappelijk Onderzoek (3G035722, 40007560) ; Fonds De La Recherche Scientifique-FNRS (40007560) ; European Space Agency (E/0365-70-NAVISP) .
dc.identifier.doi10.1364/OL.564405
dc.identifier.issn0146-9592
dc.identifier.pmidMEDLINE:40751964
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/46109
dc.publisherOptica Publishing Group
dc.source.beginpage4678
dc.source.endpage4681
dc.source.issue15
dc.source.journalOPTICS LETTERS
dc.source.numberofpages4
dc.source.volume50
dc.subject.keywordsMACH-ZEHNDER MODULATOR
dc.title

Demonstration of lithium niobate integration on a 200-mm silicon photonics wafer using transfer printing

dc.typeJournal article
dspace.entity.typePublication
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