Publication:
SSRM technique for 2D and 3D carrier mapping at the nm-scale
Date
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.orcidimec | Eyben, Pierre::0000-0003-3686-556X | |
| dc.date.accessioned | 2021-10-20T10:57:07Z | |
| dc.date.available | 2021-10-20T10:57:07Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20664 | |
| dc.source.conference | 15th TechnicalL & Scientific Meeting of ARCSIS "Characterization for Microelectronics and Photovoltaics" | |
| dc.source.conferencedate | 28/11/2012 | |
| dc.source.conferencelocation | Aix en Provence France | |
| dc.title | SSRM technique for 2D and 3D carrier mapping at the nm-scale | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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