Publication:

Ni-silicided deep source/drain junctions formed by solid phase epitaxial regrowth

Date

2004
Proceedings Paper
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dc.contributor.authorLauwers, Anne
dc.contributor.authorLindsay, Richard
dc.contributor.authorHenson, Kirklen
dc.contributor.authorSeveri, Simone
dc.contributor.authorAkheyar, Amal
dc.contributor.authorPawlak, Bartek
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-15T14:23:33Z
dc.date.available2021-10-15T14:23:33Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9184
dc.source.beginpage43
dc.source.conferenceSilicon Front-End Junction Formation - Physics and Technology
dc.source.conferencedate12/04/2004
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage48
dc.title

Ni-silicided deep source/drain junctions formed by solid phase epitaxial regrowth

dc.typeProceedings paper
dspace.entity.typePublication
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