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Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations
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Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tokei, Zsolt
;
Mc Inerney, David
;
Baklanov, Mikhaïl
;
Beyer, Gerald
;
Maex, Karen
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1788
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Acq. date: 2025-12-15
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Metrics
Views
1788
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-15
Citations