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Analysis of zero-temperature coefficient behavior on vertically stacked double nanosheet nMOS devices

 
dc.contributor.authorCoelho, Carlos H. S.
dc.contributor.authorMartino, Joao A.
dc.contributor.authorBellodi, Marcello
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVeloso, Anabela
dc.contributor.authorAgopian, Paula G. D.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.orcidextCoelho, Carlos H. S.::0000-0003-0412-4476
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2022-03-07T10:40:00Z
dc.date.available2022-03-07T10:40:00Z
dc.date.issued2021
dc.identifier.doi10.1016/j.mejo.2021.105277
dc.identifier.issn0026-2692
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39334
dc.publisherELSEVIER SCI LTD
dc.source.beginpage105277
dc.source.issuena
dc.source.journalMICROELECTRONICS JOURNAL
dc.source.numberofpages6
dc.source.volume117
dc.subject.keywordsDEGRADATION
dc.subject.keywordsPOINT
dc.subject.keywordsMOBILITY
dc.title

Analysis of zero-temperature coefficient behavior on vertically stacked double nanosheet nMOS devices

dc.typeJournal article
dspace.entity.typePublication
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