Publication:
Determination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperatures
Date
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Zahedmanesh, Houman | |
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.author | Hangen, Ude | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Zahedmanesh, Houman | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-23T16:25:22Z | |
| dc.date.available | 2021-10-23T16:25:22Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27501 | |
| dc.source.beginpage | 61 | |
| dc.source.conference | Materials for Advanced Metallization Conference - MAM | |
| dc.source.conferencedate | 20/03/2016 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.source.endpage | 62 | |
| dc.title | Determination of thermal expansion coefficients of low-k dielectrics by cube corner indentation tests at elevated temperatures | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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