Publication:

High-Endurance Ferroelectric (La, Y) and (La, Gd) Co-Doped Hafnium Zirconate Grown by Atomic Layer Deposition

Date

2022
Journal article
https://doi.org/10.1021/acsaelm.2c00063
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorWalke, Amey
dc.contributor.authorBizindavyi, Jasper
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorPotoms, Goedele
dc.contributor.authorKatcko, Kostantine
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorDelhougne, Romain
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorWalke, Amey
dc.contributor.imecauthorBizindavyi, Jasper
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorPotoms, Goedele
dc.contributor.imecauthorKatcko, Kostantine
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.contributor.orcidimecBizindavyi, Jasper::0000-0002-2213-9017
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecKatcko, Kostantine::0000-0002-0576-8962
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2023-01-03T10:46:16Z
dc.date.available2022-06-02T02:20:05Z
dc.date.available2023-01-03T10:46:16Z
dc.date.embargo9999-12-31
dc.date.issued2022
dc.identifier.doi10.1021/acsaelm.2c00063
dc.identifier.issn2637-6113
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39916
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage1823
dc.source.endpage1831
dc.source.issue4
dc.source.journalACS APPLIED ELECTRONIC MATERIALS
dc.source.numberofpages9
dc.source.volume4
dc.subject.keywordsFIELD-CYCLING BEHAVIOR
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsPOLARIZATION
dc.subject.keywordsOPERATION
dc.subject.keywordsPHASE
dc.subject.keywordsOXIDE
dc.subject.keywordsZRO2
dc.title

High-Endurance Ferroelectric (La, Y) and (La, Gd) Co-Doped Hafnium Zirconate Grown by Atomic Layer Deposition

dc.typeJournal article
dspace.entity.typePublication
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