Publication:
Contacting advanced CMOS devices by local interconnects
Date
| dc.contributor.author | Demuynck, Steven | |
| dc.contributor.imecauthor | Demuynck, Steven | |
| dc.date.accessioned | 2021-10-21T07:17:00Z | |
| dc.date.available | 2021-10-21T07:17:00Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22252 | |
| dc.source.conference | China Semiconductor Technology International Conference - CSTIC | |
| dc.source.conferencedate | 17/03/2013 | |
| dc.source.conferencelocation | Shanghai China | |
| dc.title | Contacting advanced CMOS devices by local interconnects | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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