Publication:
Sputter rate variations in silicon under high k dielectric films
Date
| dc.contributor.author | Benett, Joe | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Beebe, M. | |
| dc.contributor.author | Sparks, C. | |
| dc.contributor.author | Gondran, C. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T04:00:50Z | |
| dc.date.available | 2021-10-15T04:00:50Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7199 | |
| dc.source.beginpage | 82 | |
| dc.source.conference | International Conference on Secondary Ion Mass Spectrometry - SIMS XIV | |
| dc.source.conferencedate | 14/09/2003 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | Sputter rate variations in silicon under high k dielectric films | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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