Publication:

Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography

Date

 
dc.contributor.authorDumon, Pieter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorWiaux, Vincent
dc.contributor.authorBeckx, Stephan
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-15T13:18:13Z
dc.date.available2021-10-15T13:18:13Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8867
dc.source.beginpage28
dc.source.conferenceProceedings 1st IEEE International Conference on Group IV Photonics
dc.source.conferencedate29/09/2004
dc.source.conferencelocationHong Kong
dc.source.endpage30
dc.title

Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: