Publication:

Impact of LER and Via-misalignment on the electric field between nanometer-scale wires

Date

2008
Proceedings Paper
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dc.contributor.authorStucchi, Michele
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorTokei, Zsolt
dc.date.accessioned2021-10-17T11:03:55Z
dc.date.available2021-10-17T11:03:55Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14522
dc.source.beginpage174
dc.source.conference11th International Interconnect Technology Conference - IITC
dc.source.conferencedate1/06/2008
dc.source.conferencelocationSan Francisco, CA US
dc.source.endpage176
dc.title

Impact of LER and Via-misalignment on the electric field between nanometer-scale wires

dc.typeProceedings paper
dspace.entity.typePublication
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