Publication:
USJ metrology : from 0D to 3D analysis
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T21:03:35Z | |
| dc.date.available | 2021-10-16T21:03:35Z | |
| dc.date.issued | 2007-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13121 | |
| dc.source.beginpage | 233 | |
| dc.source.conference | Proceedings of the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics | |
| dc.source.conferencedate | 27/03/2007 | |
| dc.source.conferencelocation | Gaithersburg, MD USA | |
| dc.source.endpage | 245 | |
| dc.title | USJ metrology : from 0D to 3D analysis | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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