Publication:
In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction
Date
| dc.contributor.author | Nguyen, Duy | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Van Daele, Benny | |
| dc.contributor.author | Ryan, Paul | |
| dc.contributor.author | Wormington, Matthew | |
| dc.contributor.author | Hopkins, John | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.date.accessioned | 2021-10-16T18:08:36Z | |
| dc.date.available | 2021-10-16T18:08:36Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12613 | |
| dc.identifier.url | http://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000010000001000151000001&idtype=cvips&gifs=Yes | |
| dc.source.beginpage | 151 | |
| dc.source.conference | Analytical Techniques for Semiconductor Materials and Process Characterization 5 - ALTECH | |
| dc.source.conferencedate | 13/09/2007 | |
| dc.source.conferencelocation | München | |
| dc.source.endpage | 160 | |
| dc.title | In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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