Publication:

Atomic layer deposition of hafnium silicate gate dielectric layers

Date

2007

Journal article

Simple item page Full metadata Statistics

Files

15708.pdf 383.43 KB

Author(s)

Delabie, Annelies

;

Pourtois, Geoffrey

;

;

De Gendt, Stefan

;

Ragnarsson, Lars-Ake

;

;

Fedorenko, Yanina

;

;

Journal

Journal of Vacuum Science and Technology A

Statistics

1969 since deposited on 2021-10-16

Acq. date: 2026-01-26