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Improvement in drain-induced-barrier-lowering and on-state current characteristics of bulk Si fin field-effect-transistors using high temperature phosphorus extension ion implantation
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Improvement in drain-induced-barrier-lowering and on-state current characteristics of bulk Si fin field-effect-transistors using high temperature phosphorus extension ion implantation
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kikuchi, Yoshiaki
;
Hopf, Toby
;
Mannaert, Geert
;
Everaert, Jean-Luc
;
Kubicek, Stefan
;
Eyben, Pierre
;
Waite, Andrew
;
Borniquel, Jose
;
Variam, Naushad
;
Mocuta, Dan
;
Horiguchi, Naoto
Journal
Solid-State Electronics
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1881
since deposited on 2021-10-27
Acq. date: 2025-12-12
Citations
Metrics
Views
1881
since deposited on 2021-10-27
Acq. date: 2025-12-12
Citations