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Demonstration of phase-controlled Ni-FUSI CMOSFETs employing SiON dielectrics capped with sub-monolayer ALD HfSiON for low power applications
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1918 since deposited on 2021-10-16
Acq. date: 2026-07-16
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1918 since deposited on 2021-10-16
Acq. date: 2026-07-16
Citations