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Articles
Growth per cycle in atomic layer deposition: real application examples of a theoretical model
Publication:
Growth per cycle in atomic layer deposition: real application examples of a theoretical model
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puurunen, Riikka
Journal
Chemical Vapor Deposition
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1986
since deposited on 2021-10-15
2
last month
Acq. date: 2026-01-06
Citations
Metrics
Views
1986
since deposited on 2021-10-15
2
last month
Acq. date: 2026-01-06
Citations