Publication:
Optimization of post ion implant ash plasma and clean for ultra shallow extension/halo implantation
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2004 since deposited on 2021-10-19
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Acq. date: 2026-02-28
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Statistics
Views
2004 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2026-02-28
Citations