Publication:
Micromachined infrared pneumatic detector for gas sensor
Date
| dc.contributor.author | Chévrier, Jean-Baptiste | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Slater, Tim | |
| dc.contributor.author | Verbist, Agnes | |
| dc.date.accessioned | 2021-09-29T13:04:30Z | |
| dc.date.available | 2021-09-29T13:04:30Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/552 | |
| dc.source.beginpage | 71 | |
| dc.source.endpage | 74 | |
| dc.source.journal | Microsystem Technologies | |
| dc.source.volume | 1 | |
| dc.title | Micromachined infrared pneumatic detector for gas sensor | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |