Publication:
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
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1963 since deposited on 2021-10-21
4last month
Acq. date: 2025-12-09
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Metrics
Views
1963 since deposited on 2021-10-21
4last month
Acq. date: 2025-12-09
Citations