Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
Publication:
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
Date
2013
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
27578.pdf
925.19 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Levrau, Elisabeth
;
Devloo-Casier, Kilain
;
Dendooven, Jolien
;
Ludwig, Karl
;
Verdonck, Patrick
;
Meersschaut, Johan
;
Baklanov, Mikhaïl
;
Detavernier, Christophe
Journal
Langmuir
Abstract
Description
Metrics
Views
1958
since deposited on 2021-10-21
424
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1958
since deposited on 2021-10-21
424
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations