Publication:
Metal deposition on Ge surfaces
Date
| dc.contributor.author | Sioncke, Sonja | |
| dc.contributor.author | Onsia, Bart | |
| dc.contributor.author | Struys, K. | |
| dc.contributor.author | Rip, Jens | |
| dc.contributor.author | Vos, Rita | |
| dc.contributor.author | Meuris, Marc | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Theuwis, A. | |
| dc.contributor.imecauthor | Onsia, Bart | |
| dc.contributor.imecauthor | Rip, Jens | |
| dc.contributor.imecauthor | Vos, Rita | |
| dc.contributor.imecauthor | Meuris, Marc | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
| dc.date.accessioned | 2021-10-16T05:08:09Z | |
| dc.date.available | 2021-10-16T05:08:09Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11217 | |
| dc.source.beginpage | 220 | |
| dc.source.conference | Cleaning Technology in Semiconductor Device Manufacturing IX | |
| dc.source.conferencedate | 16/10/2005 | |
| dc.source.conferencelocation | Los Angeles, CA USA | |
| dc.source.endpage | 227 | |
| dc.title | Metal deposition on Ge surfaces | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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