Publication:
SLIM-cut thin silicon wafering with enhanced crack and stress control
Date
| dc.contributor.author | Vaes, Jan | |
| dc.contributor.author | Masolin, Alex | |
| dc.contributor.author | Pesquera Rodriguez, Amaia | |
| dc.contributor.author | Dross, Frederic | |
| dc.date.accessioned | 2021-10-18T22:37:48Z | |
| dc.date.available | 2021-10-18T22:37:48Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18123 | |
| dc.source.beginpage | 777212 | |
| dc.source.conference | Next Generation (Nano) Photonic and Cell Technologies for Solar Energy | |
| dc.source.conferencedate | 2/08/2010 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | SLIM-cut thin silicon wafering with enhanced crack and stress control | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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