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Low dielectric constant materials for microelectronics
Publication:
Low dielectric constant materials for microelectronics
Date
2003-06
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maex, Karen
;
Baklanov, Mikhaïl
;
Shamiryan, Denis
;
Iacopi, Francesca
;
Brongersma, Sywert
;
Yanovitskaya, Z.S.
Journal
Journal of Applied Physics
Abstract
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1865
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1865
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations