Publication:

Poly-open and metal CMP steps in RMG processing on planar and 3D architecture devices

Date

2011
Proceedings Paper
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Author(s)

Devriendt, Katia  
;
Kellens, Kristof  
;
Veloso, Anabela  
;
Athimulam, Raja  
;
Horiguchi, Naoto  
;
Leunissen, Peter

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1996 since deposited on 2021-10-19
Acq. date: 2026-09-17

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1996 since deposited on 2021-10-19
Acq. date: 2026-09-17

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