Publication:
Guest Editorial Special Section on the 2025 SEMI Advanced Semiconductor Manufacturing Conference
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtualsource.department | 7ded5759-f876-45bf-a35b-33c35f20fb78 | |
| cris.virtualsource.orcid | 7ded5759-f876-45bf-a35b-33c35f20fb78 | |
| dc.contributor.author | Bickford, Jeanne Paulette | |
| dc.contributor.author | Buengener, Ralf | |
| dc.contributor.author | Le Cunff, Delphine | |
| dc.contributor.author | Mitra, Reshmi | |
| dc.contributor.author | Radloff, Stefan | |
| dc.date.accessioned | 2026-09-08T07:36:27Z | |
| dc.date.available | 2026-09-08T07:36:27Z | |
| dc.date.createdwos | 2026 | |
| dc.date.issued | 2026 | |
| dc.identifier.doi | 10.1109/tsm.2026.3708019 | |
| dc.identifier.eissn | 1558-2345 | |
| dc.identifier.issn | 0894-6507 | |
| dc.identifier.issn | 1558-2345 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/60255 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 378 | |
| dc.source.endpage | 380 | |
| dc.source.issue | 3 | |
| dc.source.journal | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | |
| dc.source.numberofpages | 3 | |
| dc.source.volume | 39 | |
| dc.title | Guest Editorial Special Section on the 2025 SEMI Advanced Semiconductor Manufacturing Conference | |
| dc.type | Editorial material | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2026-08-08 | |
| imec.internal.source | crawler | |
| imec.internal.wosCreatedAt | 2026-09-07 | |
| Files | ||
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