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High Ge content SiGe thin films: growth, properties and integration

Date

2014
Proceedings Paper
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dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRosseel, Erik
dc.contributor.authorDhayalan, Sathish Kumar
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMertens, Hans
dc.contributor.authorBender, Hugo
dc.contributor.authorFavia, Paola
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-22T01:58:26Z
dc.date.available2021-10-22T01:58:26Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23936
dc.identifier.urlhttp://ecst.ecsdl.org/content/64/6/831.abstract
dc.source.beginpage831
dc.source.conferenceSiGe, Ge, and Related Copounds 6: Materials, Processing, and Devices
dc.source.conferencedate5/10/2014
dc.source.conferencelocationCancun Mexico
dc.source.endpage839
dc.title

High Ge content SiGe thin films: growth, properties and integration

dc.typeProceedings paper
dspace.entity.typePublication
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