Publication:

Issues for megasonic cleaning without damaging

Date

2005
Proceedings Paper
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dc.contributor.authorVereecke, Guy
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorArnauts, Sophia
dc.contributor.authorBeckx, Stephan
dc.contributor.authorJaenen, Patrick
dc.contributor.authorKenis, Karine
dc.contributor.authorLismont, Mark
dc.contributor.authorLux, Marcel
dc.contributor.authorVos, Rita
dc.contributor.authorSnow, Jim
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLismont, Mark
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-16T06:48:44Z
dc.date.available2021-10-16T06:48:44Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11505
dc.source.conferenceSCP 9th International Symposium on Wafer Cleaning and Surface Preparation
dc.source.conferencedate8/06/2005
dc.source.conferencelocationBoise, ID USA
dc.title

Issues for megasonic cleaning without damaging

dc.typeProceedings paper
dspace.entity.typePublication
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