Publication:
Studies on size effect of copper interconnect lines
Date
| dc.contributor.author | Wu, Wen | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T18:26:30Z | |
| dc.date.available | 2021-10-14T18:26:30Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5847 | |
| dc.source.beginpage | 416 | |
| dc.source.conference | ICSICT - 6th International Conference on Solid-State Integrated Circuit Technology. Proceedings | |
| dc.source.conferencedate | 22/10/2001 | |
| dc.source.conferencelocation | Shanghai China | |
| dc.source.endpage | 418 | |
| dc.title | Studies on size effect of copper interconnect lines | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |