Publication:

Photosensitive insulation coating for a copper redistribution layer process

Date

2014

Proceedings Paper

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Author(s)

Matsutani, Hiroshi

;

Mitsukura, Kazuyuki

;

Makino, Tatsuya

;

;

Detalle, Mikael

;

;

Metrics

1807 since deposited on 2021-10-22

Acq. date: 2026-01-06