Publication:

Plan-view specimen preparation of device structures with FIB

Date

2015
Presentation
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dc.contributor.authorBender, Hugo
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorRichard, Olivier
dc.contributor.authorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorFavia, Paola
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.date.accessioned2021-10-22T18:32:51Z
dc.date.available2021-10-22T18:32:51Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24985
dc.source.conferenceESREF European FIB Uuser Group Workshop - EFUG
dc.source.conferencedate8/10/2015
dc.source.conferencelocationToulouse France
dc.title

Plan-view specimen preparation of device structures with FIB

dc.typeOral presentation
dspace.entity.typePublication
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