Power Delivery Network (PDN) modeling for backside-PDN configurations with buried power rails and uTSVs

dc.contributor.author	Hossen, Md Obaidul
dc.contributor.author	Chava, Bharani
dc.contributor.author	Van der Plas, Geert
dc.contributor.author	Beyne, Eric
dc.contributor.author	Bakir, Muhannad
dc.contributor.imecauthor	Van der Plas, Geert
dc.contributor.imecauthor	Beyne, Eric
dc.contributor.orcidimec	Van der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimec	Beyne, Eric::0000-0002-3096-050X
dc.date.accessioned	2021-10-28T22:37:10Z
dc.date.available	2021-10-28T22:37:10Z
dc.date.embargo	9999-12-31
dc.date.issued	2020
dc.identifier.issn	0018-9383
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/35282
dc.identifier.url	https://ieeexplore.ieee.org/document/8932458
dc.source.beginpage	11
dc.source.endpage	17
dc.source.issue	1
dc.source.journal	IEEE Transactions on Electron Devices
dc.source.volume	67
dc.title	Power Delivery Network (PDN) modeling for backside-PDN configurations with buried power rails and uTSVs
dc.type	Journal article
dspace.entity.type	Publication
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