Publication:
Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
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1970 since deposited on 2021-10-29
1last month
Acq. date: 2026-02-25
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Statistics
Views
1970 since deposited on 2021-10-29
1last month
Acq. date: 2026-02-25
Citations