Publication:

Optical phonon lifetimes in sputtered AlN thin films

Date

2012
Journal article
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dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorRuttens, Bart
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorRuttens, Bart
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecRuttens, Bart::0000-0002-9116-6502
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-20T14:40:23Z
dc.date.available2021-10-20T14:40:23Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21314
dc.source.beginpage191906
dc.source.issue19
dc.source.journalApplied Physics Letters
dc.source.volume100
dc.title

Optical phonon lifetimes in sputtered AlN thin films

dc.typeJournal article
dspace.entity.typePublication
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