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The impact of dummy gate processing on Si-cap-free SiGe passivation: a physical characterization study on strained SiGe 25% and 45%
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The impact of dummy gate processing on Si-cap-free SiGe passivation: a physical characterization study on strained SiGe 25% and 45%
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wostyn, Kurt
;
Ragnarsson, Lars-Ake
;
Schram, Tom
;
Witters, Liesbeth
;
Conard, Thierry
;
Douhard, Bastien
;
Vanhaeren, Danielle
;
Holsteyns, Frank
;
Vandervorst, Wilfried
;
Horiguchi, Naoto
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Acq. date: 2025-12-15
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Metrics
Views
1849
since deposited on 2021-10-24
3
last month
1
last week
Acq. date: 2025-12-15
Citations