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The impact of dummy gate processing on Si-cap-free SiGe passivation: a physical characterization study on strained SiGe 25% and 45%

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1853 since deposited on 2021-10-24
1last month
Acq. date: 2026-04-06

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1853 since deposited on 2021-10-24
1last month
Acq. date: 2026-04-06

Citations