Publication:
He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles
Date
| dc.contributor.author | Luysberg, M. | |
| dc.contributor.author | Hueging, N. | |
| dc.contributor.author | Urban, K. | |
| dc.contributor.author | Buca, D. | |
| dc.contributor.author | Holländer, B. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Morschbacher, M. | |
| dc.contributor.author | Fichner, P.F.P. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-15T14:36:16Z | |
| dc.date.available | 2021-10-15T14:36:16Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9235 | |
| dc.source.beginpage | 117 | |
| dc.source.conference | Program and Abstracts Book 2nd International SiGe Technology and Device Meeting - ISTDM | |
| dc.source.conferencedate | 17/05/2004 | |
| dc.source.conferencelocation | Frankfurt am Oder Germany | |
| dc.source.endpage | 118 | |
| dc.title | He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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