Publication:
Dopant/carrier profiling for sub-45nm technologies
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Duriau, Edouard | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.date.accessioned | 2021-10-16T06:34:26Z | |
| dc.date.available | 2021-10-16T06:34:26Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11466 | |
| dc.source.conference | 8th International Workshop on Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors | |
| dc.source.conferencedate | 5/06/2005 | |
| dc.source.conferencelocation | Daytona Beach, FL USA | |
| dc.title | Dopant/carrier profiling for sub-45nm technologies | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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