Publication:

Infrared interface analysis of high-k dielectrics deposited by atomic layer chemical vapour deposition

Date

2001

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Cosnier, Vincent

;

;

;

;

Conard, Thierry

;

Nohira, Hiroshi

;

Richard, Olivier

;

;

Vandervorst, Wilfried

;

;

;

De Gendt, Stefan

;

;

;

Tuominen, Marko

;

;

;

Statistics

1951 since deposited on 2021-10-14

1last month

1last week

Acq. date: 2026-10-06