Publication:

Infrared interface analysis of high-k dielectrics deposited by atomic layer chemical vapour deposition

Date

2001

Proceedings Paper

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Author(s)

Cosnier, Vincent

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Conard, Thierry

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Nohira, Hiroshi

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Richard, Olivier

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Vandervorst, Wilfried

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De Gendt, Stefan

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Tuominen, Marko

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1947 since deposited on 2021-10-14

Acq. date: 2026-02-25