Publication:

DLTS of p-type Czochralski Si wafers containing processing-induced macropores

Date

2012
Journal article
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorDepauw, Valerie
dc.contributor.authorGordon, Ivan
dc.contributor.authorPoortmans, Jef
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-20T16:09:40Z
dc.date.available2021-10-20T16:09:40Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn0268-1242
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21513
dc.source.beginpage15013
dc.source.issue1
dc.source.journalSemiconductor Science and Technology
dc.source.volume27
dc.title

DLTS of p-type Czochralski Si wafers containing processing-induced macropores

dc.typeJournal article
dspace.entity.typePublication
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