Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Investigation of iridium as a gate electrode for deep sub-micron CMOS technology
Publication:
Investigation of iridium as a gate electrode for deep sub-micron CMOS technology
Copy permalink
Date
2003-11
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pawlak, M.A.
;
Schram, Tom
;
Maex, Karen
;
Vantomme, Andre
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1888
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1888
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations