Publication:

Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors

Date

2004
Presentation
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dc.contributor.authorGoux, Ludovic
dc.contributor.authorXu, Zhen
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorSchwitters, M.
dc.contributor.authorLisoni, Judit
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorZambrano, R.
dc.contributor.authorWouters, Dirk
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.date.accessioned2021-10-15T13:38:21Z
dc.date.available2021-10-15T13:38:21Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8976
dc.source.conferenceJournées Couches Ferroelectriques - JCF
dc.source.conferencedate18/11/2004
dc.source.conferencelocationBesançon France
dc.title

Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors

dc.typeOral presentation
dspace.entity.typePublication
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