Publication:

Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanism

Date

2018
Journal article
https://doi.org/10.1021/acs.chemmater.8b02924
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Author(s)

Groven, Benjamin  
;
Nalin Mehta, Ankit  
;
Bender, Hugo  
;
Meersschaut, Johan  
;
Nuytten, Thomas  
;
Verdonck, Patrick  
;
Conard, Thierry  
;
Smets, Quentin  
;
Schram, Tom  
;
Schoenaers, Ben  
;
Stesmans, Andre  
;
Afanasiev, Valeri  
;
Vandervorst, Wilfried  
;
Heyns, Marc  
;
Caymax, Matty  
;
Radu, Iuliana  
;
Delabie, Annelies  

Journal

Chemistry of Materials

Abstract

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1916 since deposited on 2021-10-25
Acq. date: 2026-02-24

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1916 since deposited on 2021-10-25
Acq. date: 2026-02-24

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