Publication:

Nanosheet FETs and their Potential for Enabling Continued Moore's Law Scaling

Date

2021
Proceedings Paper
https://doi.org/10.1109/EDTM50988.2021.9420942
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Author(s)

Veloso, Anabela  
;
Eneman, Geert  
;
De Keersgieter, An  
;
Jang, Doyoung  
;
Mertens, Hans  
;
Matagne, Philippe  
;
Dentoni Litta, Eugenio  
;
Ryckaert, Julien  
;
Horiguchi, Naoto  

Journal

na

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1865 since deposited on 2022-03-16
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Acq. date: 2026-02-24

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