Publication:
Achieving reproducible data: examples from surface analysis in semiconductor technology
Date
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | van der Heide, Paul | |
| dc.contributor.author | Vanleenhove, Anja | |
| dc.contributor.author | Zborowski, Charlotte | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | van der Heide, Paul | |
| dc.contributor.imecauthor | Vanleenhove, Anja | |
| dc.contributor.imecauthor | Zborowski, Charlotte | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
| dc.date.accessioned | 2021-10-27T08:09:18Z | |
| dc.date.available | 2021-10-27T08:09:18Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32737 | |
| dc.identifier.url | https://www2.avs.org/symposium2019/Papers/Paper_RA+AS+BI-WeA2.html | |
| dc.source.beginpage | RA+AS+BI-WeA2 | |
| dc.source.conference | AVS 66th International Symposium & Exhibition | |
| dc.source.conferencedate | 20/10/2019 | |
| dc.source.conferencelocation | Columbus, OH USA | |
| dc.title | Achieving reproducible data: examples from surface analysis in semiconductor technology | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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