Publication:
IMP liners for all speed fill
Date
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Daniels, Stephen | |
| dc.contributor.author | Maity, Nirmalya | |
| dc.contributor.author | Bassanini, Davide | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-30T11:28:10Z | |
| dc.date.available | 2021-09-30T11:28:10Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2395 | |
| dc.source.conference | Advanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA. | |
| dc.source.conferencelocation | ||
| dc.title | IMP liners for all speed fill | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |