Publication:
High-damping carbon nanotube hinged micromirrors
Date
| dc.contributor.author | De Volder, Michael | |
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Reynaerts, Dominiek | |
| dc.contributor.author | Van Hoof, Chris | |
| dc.contributor.author | Sang-Gook, Kim | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Van Hoof, Chris | |
| dc.date.accessioned | 2021-10-20T10:34:59Z | |
| dc.date.available | 2021-10-20T10:34:59Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 1613-6810 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20563 | |
| dc.source.beginpage | 2006 | |
| dc.source.endpage | 2010 | |
| dc.source.issue | 3 | |
| dc.source.journal | Small | |
| dc.source.volume | 8 | |
| dc.title | High-damping carbon nanotube hinged micromirrors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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