Publication:
MEMS SiGE platform and applications
Date
| dc.contributor.author | Severi, Simone | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.date.accessioned | 2021-10-20T15:59:26Z | |
| dc.date.available | 2021-10-20T15:59:26Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21491 | |
| dc.source.conference | 2nd International Symposium on Integrated Microsystems - ISIM | |
| dc.source.conferencedate | 13/02/2012 | |
| dc.source.conferencelocation | Tsukuba Japan | |
| dc.title | MEMS SiGE platform and applications | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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