Publication:
Innovation in ion beam analysis for nanoelectronic materials
Date
| dc.contributor.author | Laricchiuta, Grazia | |
| dc.contributor.thesisadvisor | Vandervorst, Wilfried | |
| dc.contributor.thesisadvisor | Meersschaut, Johan | |
| dc.date.accessioned | 2021-10-27T12:05:54Z | |
| dc.date.available | 2021-10-27T12:05:54Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2019-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33372 | |
| dc.identifier.url | https://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS2866348&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US | |
| dc.title | Innovation in ion beam analysis for nanoelectronic materials | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |