Publication:

Backside analysis of ultra-thin film stacks in microelectronics technology using X-ray photoelectron spectroscopy

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHantschel, Thomas
dc.contributor.authorDemeulemeester, Cindy
dc.contributor.authorSuderie, Arnaud
dc.contributor.authorLacave, Thomas
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-17T22:42:19Z
dc.date.available2021-10-17T22:42:19Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15432
dc.source.beginpageHH08-04
dc.source.conferenceElectron Crystallography for Materials Research and Quantitative Characterization of Nanostructured Materials
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Backside analysis of ultra-thin film stacks in microelectronics technology using X-ray photoelectron spectroscopy

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
18179.pdf
Size:
229.92 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions