Publication:
Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1980 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1980 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-10
Citations