Publication:
Critical-dimension metrology for integrated circuit technology
Date
| dc.contributor.author | Marchman, Herschel | |
| dc.contributor.author | Lorusso, Gian | |
| dc.contributor.author | Adel, Mike | |
| dc.contributor.author | Yedur, Sanjay | |
| dc.contributor.imecauthor | Lorusso, Gian | |
| dc.date.accessioned | 2021-10-16T17:50:01Z | |
| dc.date.available | 2021-10-16T17:50:01Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12553 | |
| dc.source.beginpage | 701 | |
| dc.source.book | Mircolithography Science and Technology | |
| dc.source.endpage | 798 | |
| dc.title | Critical-dimension metrology for integrated circuit technology | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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